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Biography

Parage Banerjee is a professor in the UCF Department of Materials Science and Engineering. He joined UCF in 2018. His research focuses on the fundamental and applied aspects of atomic layer deposition. He has more than 60 peer-reviewed publications and holds nine U.S. and international patents. His research work is supported by the NSF, AFOSR, Semiconductor Research Corporation and private entities. Prior to his appointment at UCF, Banerjee was an assistant professor at Washington University. He was also a research and development process engineer at Micron Technology Inc., studying high-k dielectrics and their reliability in DRAM transistors and capacitors.

Recent Publications


  • Feit, C.; Kumar, U.; Islam, M. R.; Tomar, L.; Berriel, S. N.; Gaskins, J. T.; Hopkins, P. E.; Seal, S.; Banerjee, P., Surface treatment of TaN for sub-2 nm, smooth, and conducting atomic layer deposition Ru films. J. Vac. Sci. Technol. A 2024, 42 (3).

  • Berriel, S. N.; Feit, C.; Keller, N.; Rudawski, N. G.; Banerjee, P., In situ spectroscopic ellipsometry and rigorous coupled wave analysis for real time profile evolution of atomic layer deposited films inside SiO2 nanotrenches. J. Vac. Sci. Technol. A 2022, 40 (6), 7.

  • Ganesan, J. P.; Dev, D.; Krishnaprasad, A.; Feit, C.; Moser, D.; Kanjolia, R. K.; Roy, T.; Banerjee, P., Semiconductor-to-metal transition in atomic layer deposition (ALD) of VO2 films using VCl4 and water. Appl. Phys. Lett. 2021, 118 (26), 5.

  • Gao, Z. N.; Banerjee, P., Review Article: Atomic layer deposition of doped ZnO films. J. Vac. Sci. Technol. A 2019, 37 (5), 17.

  • Wu, F.; Banerjee, S.; Li, H. F.; Myung, Y.; Banerjee, P., Indirect Phase Transformation of CuO to Cu2O on a Nanowire Surface. Langmuir 2016, 32 (18), 4485-4493.

  • Myung, Y.; Wu, F.; Banerjee, S.; Park, J.; Banerjee, P., Electrical conductivity of p-type BiOCl nanosheets. Chem. Commun. 2015, 51 (13), 2629-2632.

  • Wu, F.; Tian, L. M.; Kanjolia, R.; Singamaneni, S.; Banerjee, P., Plasmonic Metal-to-Semiconductor Switching in Au Nanorod-ZnO nanocomposite films. ACS Appl. Mater. Interfaces 2013, 5 (16), 7693-7697.

  • Banerjee, P.; Perez, I.; Henn-Lecordier, L.; Lee, S. B.; Rubloff, G. W., Nanotubular metal-insulator-metal capacitor arrays for energy storage. Nat. Nanotechnol. 2009, 4 (5), 292-296.

  • Banerjee, P.; Ditali, A., Uniqueness in activation energy and charge-to-breakdown of highly asymmetrical DRAM Al2O3 cell capacitors. IEEE Electron Device Lett. 2004, 25 (8), 574-576.

Education


  • Ph.D., University of Maryland, College Park, 2011

  • M.S., Washington State University, 2000

  • B.E., Indian Institute of Technology, 1998

Specialties

Materials:
  • Morphology: Thin films, nanoparticles, nanowires
  • Systems: Metals, metal oxides, nitrides, sulphides, organic-inorganic hybrid
Processes:
  • Atomic layer deposition
  • Chemical vapor deposition
  • Electrochemical deposition
  • Atomic layer etching
Fundamental and applications:
  • Chemical transformations on atomically engineered surfaces
  • Electronic and optoelectronic transport in quantum confined systems